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Part’s Materials division provides the best quality products with the advanced parts and material technologies to various needs of customers.

WI-CERA

WI-CERA products include WET-STATION (return/drive) and EUV,VAC,GAS,LASMA (return/drive)

  • wet station

    2MAS&2MXG (PATENTED) Life Extension PJT-ITEM

    return drive
    • 01
      Types of 4th GEN Ball & Roller Bearing
      • - Ceramic Bearing (all ceramic)
      • - Hybrid Bearing (ceramic + stainless)
      • - Polymer Bearing (peek + ceramic)
    • 02
      Application process
      • - Initial cleaner (Etch(Hcl), STR(strip))
      • - Develop (Rework, EP Cleaner)
      • - Normal Cleaner (Dry Conveyyor crystal/wafer-WET -WET)
    READ MORE
  • EUV, VAC, GAS,
    Plasma

    2MAS&2MXG (PATENTED) Life Extension PJT-ITEM

    return drive
    • 01
      Types of 4th GEN Ball & Roller Bearing
      • - Ceramic Bearing (all ceramic)
      • - Hybrid Bearing (ceramic + stainless)
      • - Polymer Bearing (peek + ceramic)
    • 02
      Application process
      • - Initial cleaner (Etch(Hcl), STR(strip))
      • - Develop (Rework, EP Cleaner)
      • - Normal Cleaner (Dry Conveyyor crystal/wafer-WET -WET)
    READ MORE
X-GUIDe
WET Station (return/drive)

New technology for X-COAT CHIPPING PREVENTION PJT-ITEM

READ MORE
EUV, VAC, GAS,Plasma (return/drive)

New technology for X-COAT CHIPPING PREVENTION PJT-ITEM

READ MORE
INPECTION, DRY (return/drive)

New technology for X-COAT CHIPPING PREVENTION PJT-ITEM

READ MORE
WET Station(return/drive)

WET STATION

  • PART’S MATERIAL
  • WI-CERA
2MAS&2MXG (PATENTED) Life Extension PJT-ITEM
  • 01
    Types of 4th GEN Ball & Roller Bearing
    • - Ceramic Bearing ( all ceramic)
    • - Hybrid Bearing (ceramic + stainless)
    • - Polymer Bearing (peek + ceramic)
  • 02
    Application process
    • - Initial cleaner (Etch(Hcl) , STR(strip) )
    • - Develop ( Rework , EP Cleaner )
    • - Normal Cleaner ( Dry Conveyor Liquid crystal/wafer-WET)
5-in-1 Ultimate Technology Product Characteristics
  • Low Dust/Wear-Resistance > Material-Design
  • Low Fatigue Strength > Longest Extended
  • Low-Friction > Structural-Mechanics-Design
  • Shock-Absorption > Structural Analysis-Design
  • High Purity-Chemical-Resistance-Materials
EUV,VAC,GAS,Plasma(return/drive)

EUV,VAC,GAS,Plasma

  • PART’S MATERIAL
  • WI-CERA
2MAS&2MXG (PATENTED) Life Extension PJT-ITEM
  • 01
    Types of 4th GEN Ball Bearing
    • - Ceramic Bearing ( all ceramic)
    • - Hybrid Bearing (ceramic + high temp’ steel)
    • - Thin Section Bearing(deep + ceramic)
  • 02
    Application process
    • - EUV Process (HP/CP ,IR ,GAS)
    • - Vacuum , PVD , CVD , PECVD , Plasma
    • - High Temperature , Dry Conveyor(Liquid crystal/wafer-WET)
5-in-1 Ultimate Technology Product Characteristics
  • High Temp-Vacuum-EUV > Material-Design
  • Low-Dust/Wear-Resistance > Material-Design
  • Low-Farigue Strength > Longest Extended
  • Solid/Vaccum-lubricated tech > Structural Analysis
  • High Purity-Chemical-Gas-Resistance
WET Station(return/drive)

WET STATION

  • PART’S MATERIAL
  • X-Guide
New technology for X-COAT CHIPPING PREVENTION PJT-ITEM
  • 01
    Types of 4th GEN Guide Bearing
    • - STD30 (Standard PEEK+OD40/35/30/25/20)
    • - TAP30 ( Taper PEEK+OD40/35/30/25)
    • - SQ30 (STD30/TAP30 PEEK/PDVF/UPE+OD35/30/25)
    • - Color application by process(OEM)
  • 02
    Application process(Liquid crystal/wafer cleaning device)
    • - Initial cleaner (Etch(Hcl) , STR(strip) , Develop )
    • - Rework , EP Cleaner ,Normal Cleaner , Inspection
    • - Dry Conveyor Liquid crystal/wafer-WET) , Aligner Clean C/V
5-in-1 Ultimate Technology Product Characteristics
  • Chipping-Prevention > Longest-Extended
  • Shock-Absorption > Structural Analysis-Design
  • Low-friction > Structural-Mechnics-Design
  • Low-Dust/Wear-Resistance > Materials-Design
  • High Purity-Chemical-Resistance-Materials
EUV,VAC,GAS,Plasma(return/drive)

EUV,VAC,GAS,Plasma

  • PART’S MATERIAL
  • X-Guide
New technology for X-COAT CHIPPING PREVENTION PJT-ITEM
  • 01
    Types of 4th GEN Guide Bearing
    • - STD30 (Standard PEEK+OD40/35/30/25/20)
    • - TAP30 ( Taper PEEK+OD40/35/30/25)
    • - SQ30 (STD30/TAP30 PEEK/PI/PBI+OD35/30/25)
    • - Color application by process(OEM)
  • 02
    Application process(Liquid crystal/wafer cleaning device)
    • - EUV Process (HP/CP ,IR ,GAS)
    • - Vacuum , PVD , CVD , PECVD , Plasma
    • - High Temperature , Dry Conveyor(Liquid crystal/wafer-WET)
5-in-1 Ultimate Technology Product Characteristics
  • Chipping-Prevention > Longest-Extended
  • Low-friction > Structural-Mechnics-Design
  • Shock-Absorption > Structural Analysis-Design
  • Low-Dust/Wear-Resistance > Materials-Design
  • High Temp-Vacuum-EUV > Material-Design
INSPECTION,DRY

INSPECTION,DRY

  • PART’S MATERIAL
  • X-Guide
New technology for X-COAT CHIPPING PREVENTION PJT-ITEM
  • 01
    Types of 4th GEN Guide Bearing
    • - STD30 (Standard PEEK+OD40/35/30/25/20)
    • - TAP30 ( Taper PEEK+OD40/35/30/25)
    • - SQ30 (STD30/TAP30 PEEK/PI/PBI+OD35/30/25)
    • - Color application by process(OEM)
  • 02
    Application process(Liquid crystal/wafer cleaning device)
    • - EUV Process , HP/CP , IR , GAS
    • - Vacuum , PVD ,CVD , PECVD , Plasma
    • - High Temperature , Dry Conveyor(Liquid crystal/wafer-WET)
5-in-1 Ultimate Technology Product Characteristics
  • Chipping-Prevention > Longest-Extended
  • Shock-Absorption > Structural Analysis-Design
  • Low-friction > Structural-Mechnics-Design
  • Low-friction > Structural-Mechnics-Design
  • High Purity-Chemical-Resistance-Materials